Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Epitaxial Equipment : MBE Sources
Medium Temperature
Ammonia Resistant Sources
These extended life sources for ammonia environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
These extended life sources for ammonia environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
Cold Lip SUMO Source for Aluminum
This patented source designed specifically for aluminum evaporation eliminates damage from material creep while providing good thickness uniformity and flux stability.
This patented source designed specifically for aluminum evaporation eliminates damage from material creep while providing good thickness uniformity and flux stability.
Downward-Looking SUMO Source for Gallium and Indium
This source is designed as a Dual Filament Source with an asymmetric SUMO crucible that can accommodate a molten charge in a downward-facing source port, offering increased charge capacity with excellent flux stability and uniformity.
This source is designed as a Dual Filament Source with an asymmetric SUMO crucible that can accommodate a molten charge in a downward-facing source port, offering increased charge capacity with excellent flux stability and uniformity.
Dual Filament Source
This source uses two independent heaters, dual filaments, to prevent condensation at the crucible orifice, producing a more hydrodynamically stable flux and a reduction in morphological defects.
This source uses two independent heaters, dual filaments, to prevent condensation at the crucible orifice, producing a more hydrodynamically stable flux and a reduction in morphological defects.
Hot Lip SUMO Source for Gallium and Indium
This patented source is designed to eliminate material recondensation at the crucible orifice to reduce oval defects while offering excellent flux stability and uniformity along with an increased charge capacity.
This patented source is designed to eliminate material recondensation at the crucible orifice to reduce oval defects while offering excellent flux stability and uniformity along with an increased charge capacity.
Oxygen Resistant Sources
These extended life sources for oxygen environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
These extended life sources for oxygen environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
Single Filament Sources
This source is a cost-effective solution that offers good performance for general purpose applications utilizing a band-style thermocouple to increase thermal stability and provide better accuracy.
This source is a cost-effective solution that offers good performance for general purpose applications utilizing a band-style thermocouple to increase thermal stability and provide better accuracy.