Epitaxial Equipment : MBE Systems

More than seven years ago, Veeco introduced the revolutionary GEN2000 Cluster Tool Molecular Beam Epitaxy (MBE) System.  Since than, it has become the world's only production-proven 7x6" system.

Our production systems are the first to incorporate a modular cluster tool architecture.  This enables our systems to deliver the industry's lowest cost per wafer in a footprint 40-60% smaller than comparable MBE tools.  This design also allows for up to two growth modules around the cluster tool to greatly increase throughput or accommodate incompatible materials.  Bulkhead installation is optional, to separate load lock modules from its cluster tool and growth modules, to optimize cleanroom space.
 
Today, we introduce the GEN2000 Edge.  Through intense work, we've made the most innovative, cost-effective and highest capacity MBE production system even better—we've taken what works and optimized it.

The Veeco GEN2000 Edge System incorporates enhancements to system hardware, sources and complementary components.