Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Epitaxial Equipment
MBE Systems - Systems
GEN II MBE System
The world's premier single-wafer molecular beam epitaxy (MBE) system, with more than 220 operational systems worldwide.
The world's premier single-wafer molecular beam epitaxy (MBE) system, with more than 220 operational systems worldwide.
GEN III MBE System
With its 14 effusion cell ports, the GEN III is today's most popular MBE system for R&D and low-volume production.
With its 14 effusion cell ports, the GEN III is today's most popular MBE system for R&D and low-volume production.
GEN20 MBE System
Ultra flexible MBE system for materials research and pilot production, available as a fully automated cluster tool or a manual transfer system.
Ultra flexible MBE system for materials research and pilot production, available as a fully automated cluster tool or a manual transfer system.
GEN200 Edge MBE System 
Cluster MBE tool with the industry's most cost effective 4x4" epiwafer growth of such devices as pump lasers, VCSELs and HBTs.
Cluster MBE tool with the industry's most cost effective 4x4" epiwafer growth of such devices as pump lasers, VCSELs and HBTs.
GEN2000 Edge MBE System
Cluster MBE tool with superior throughput for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs.
Cluster MBE tool with superior throughput for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs.
GEN930 MBE System
High performance, cost-effective and flexible MBE system for materials research with 11 ports.
High performance, cost-effective and flexible MBE system for materials research with 11 ports.